Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187990 | Mirror for a microlithographic projection exposure apparatus, and method for operating a deformable mirror | Johannes Lippert, Toralf Gruner, Kerstin Hild, Philip Lucke | 2021-11-30 |