Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099484 | Method for repairing reflective optical elements for EUV lithography | Robert Meier, Holger Kierey, Christof Jalics, Eric Eva, Ralf Winter +4 more | 2021-08-24 |
| 11029515 | Optical element, and method for correcting the wavefront effect of an optical element | Kerstin Hild, Toralf Gruner | 2021-06-08 |