Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194119 | Optical assembly having a thermally conductive component | Julian Kaller, Franz Sorg, Karl-Stefan Weissenrieder | 2021-12-07 |
| 11099484 | Method for repairing reflective optical elements for EUV lithography | Robert Meier, Holger Kierey, Christof Jalics, Eric Eva, Arno Schmittner +4 more | 2021-08-24 |