Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099484 | Method for repairing reflective optical elements for EUV lithography | Robert Meier, Holger Kierey, Eric Eva, Ralf Winter, Arno Schmittner +4 more | 2021-08-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099484 | Method for repairing reflective optical elements for EUV lithography | Robert Meier, Holger Kierey, Eric Eva, Ralf Winter, Arno Schmittner +4 more | 2021-08-24 |