Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11126087 | Component for a mirror array for EUV lithography | — | 2021-09-21 |
| 11099484 | Method for repairing reflective optical elements for EUV lithography | Robert Meier, Holger Kierey, Christof Jalics, Ralf Winter, Arno Schmittner +4 more | 2021-08-24 |
| 10976667 | Optical manipulator, projection lens and projection exposure apparatus | — | 2021-04-13 |