Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199363 | Method for removing a contamination layer by an atomic layer etching process | Fred Roozeboom, Dirk Heinrich Ehm, Moritz Becker, Edwin Te Sligte, Yves Lodewijk Maria Creijghton | 2021-12-14 |
| 11145506 | Selective passivation and selective deposition | Jan Willem Maes, Michael Eugene Givens, Suvi Haukka, Vamsi K. Paruchuri, Ivo Raaijmakers +3 more | 2021-10-12 |
| 11094535 | Selective passivation and selective deposition | Eva Tois, Suvi Haukka, Raija H. Matero, Elina Färm, Delphine Longrie +5 more | 2021-08-17 |