Issued Patents 2021
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183367 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Marko Tuominen, Chiyu Zhu | 2021-11-23 |
| 11174550 | Selective deposition on metal or metallic surfaces relative to dielectric surfaces | Raija H. Matero, Elina Färm, Tom E. Blomberg | 2021-11-16 |
| 11170993 | Selective PEALD of oxide on dielectric | Eva Tois, Viljami Pore, Toshiya Suzuki, Lingyun Jia, Sun Ja Kim +1 more | 2021-11-09 |
| 11145506 | Selective passivation and selective deposition | Jan Willem Maes, Michael Eugene Givens, Vamsi K. Paruchuri, Ivo Raaijmakers, Shaoren Deng +3 more | 2021-10-12 |
| 11139383 | Titanium aluminum and tantalum aluminum thin films | Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen, Timo Asikainen +2 more | 2021-10-05 |
| 11094535 | Selective passivation and selective deposition | Eva Tois, Raija H. Matero, Elina Färm, Delphine Longrie, Hidemi Suemori +5 more | 2021-08-17 |
| 11081342 | Selective deposition using hydrophobic precursors | Elina Färm, Hidemi Suemori, Raija H. Matero, Antti Niskanen, Eva Tois | 2021-08-03 |
| 11069522 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Shang Chen, Viljami Pore, Atsuki Fukazawa, Hideaki Fukuda | 2021-07-20 |
| 11056385 | Selective formation of metallic films on metallic surfaces | Antti Niskanen, Marko Tuominen | 2021-07-06 |
| 11047040 | Dual selective deposition | Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +1 more | 2021-06-29 |
| 10923361 | Deposition of organic films | Eva Tois, Hidemi Suemori, Viljami Pore, Varun Sharma, Jan Willem Maes +2 more | 2021-02-16 |
| 10896820 | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process | — | 2021-01-19 |