Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183367 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2021-11-23 |
| 11164955 | Methods for forming a semiconductor device structure and related semiconductor device structures | Kiran Shrestha, Petri Raisanen, Michael Eugene Givens | 2021-11-02 |
| 11139383 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen +2 more | 2021-10-05 |
| 11114283 | Reactor, system including the reactor, and methods of manufacturing and using same | Tom E. Blomberg, Varun Sharma | 2021-09-07 |
| 11094582 | Selective deposition method to form air gaps | — | 2021-08-17 |
| 11056344 | Layer forming method | Kiran Shrestha, Qi Xie | 2021-07-06 |
| 10903113 | Selective deposition of aluminum and nitrogen containing material | Han Wang, Qi Xie, Delphine Longrie, Jan Willem Maes, David Kurt de Roest +4 more | 2021-01-26 |