Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183367 | Atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2021-11-23 |
| 11174550 | Selective deposition on metal or metallic surfaces relative to dielectric surfaces | Suvi Haukka, Raija H. Matero, Elina Färm | 2021-11-16 |
| 11139308 | Atomic layer deposition of III-V compounds to form V-NAND devices | Varun Sharma, Jan Willem Maes | 2021-10-05 |
| 11114283 | Reactor, system including the reactor, and methods of manufacturing and using same | Varun Sharma, Chiyu Zhu | 2021-09-07 |
| 10982325 | Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods | Juhana Kostamo, Timo Vähä-Ojala, Marko PUDAS | 2021-04-20 |