Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982325 | Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods | Juhana Kostamo, Tom E. Blomberg, Marko PUDAS | 2021-04-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982325 | Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods | Juhana Kostamo, Tom E. Blomberg, Marko PUDAS | 2021-04-20 |