Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982325 | Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods | Juhana Kostamo, Timo Vähä-Ojala, Tom E. Blomberg | 2021-04-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982325 | Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods | Juhana Kostamo, Timo Vähä-Ojala, Tom E. Blomberg | 2021-04-20 |