Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183367 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2021-11-23 |
| 11158500 | Plasma enhanced deposition processes for controlled formation of oxygen containing thin films | Lingyun Jia, Viljami Pore, Sun Ja Kim, Oreste Madia | 2021-10-26 |
| 11094535 | Selective passivation and selective deposition | Eva Tois, Suvi Haukka, Raija H. Matero, Elina Färm, Delphine Longrie +5 more | 2021-08-17 |
| 11056385 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Antti Niskanen | 2021-07-06 |
| 11047040 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Hannu Huotari +1 more | 2021-06-29 |