Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170993 | Selective PEALD of oxide on dielectric | Eva Tois, Viljami Pore, Suvi Haukka, Toshiya Suzuki, Sun Ja Kim +1 more | 2021-11-09 |
| 11158500 | Plasma enhanced deposition processes for controlled formation of oxygen containing thin films | Viljami Pore, Marko Tuominen, Sun Ja Kim, Oreste Madia | 2021-10-26 |
| 10991573 | Uniform deposition of SiOC on dielectric and metal surfaces | Viljami Pore, Eva Tois, Sun Ja Kim | 2021-04-27 |