Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11208722 | Vapor flow control apparatus for atomic layer deposition | Carl Louis White | 2021-12-28 |
| 11139383 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Jerry Winkler, Petri Raisanen, Timo Asikainen +2 more | 2021-10-05 |
| 11114294 | Structure including SiOC layer and method of forming same | Bed Prasad Sharma, Shankar Swaminathan, YoungChol Byun | 2021-09-07 |
| 10892156 | Methods for forming a silicon nitride film on a substrate and related semiconductor device structures | Jacob Woodruff, Bed Prasad Sharma | 2021-01-12 |