Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11208722 | Vapor flow control apparatus for atomic layer deposition | Eric James Shero | 2021-12-28 |
| 10975470 | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment | John Kevin Shugrue | 2021-04-13 |