Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133180 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Jun Qian, Wanki Kim, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2021-09-28 |
| 11127567 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Jun Qian, Chloe Baldasseroni, Frank L. Pasquale +8 more | 2021-09-21 |
| 11120989 | Systems and methods for UV-based suppression of plasma instability | — | 2021-09-14 |
| 11114294 | Structure including SiOC layer and method of forming same | Bed Prasad Sharma, YoungChol Byun, Eric James Shero | 2021-09-07 |
| 11072860 | Fill on demand ampoule refill | Tuan Nguyen, Eashwar Ranganathan, Adrien LaVoie, Chloe Baldasseroni, Ramesh Chandrasekharan +2 more | 2021-07-27 |
| 11011379 | Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors | Reza Arghavani, Samantha Tan, Bhadri N. Varadarajan, Adrien LaVoie, Ananda Banerji +1 more | 2021-05-18 |