Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209729 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Adrien LaVoie, Thomas Knisley +3 more | 2021-12-28 |
| 11133180 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Shankar Swaminathan, Jun Qian, Wanki Kim, Bart J. van Schravendijk +1 more | 2021-09-28 |
| 11107683 | Selective growth of metal-containing hardmask thin films | David Charles Smith, Jon Henri, Paul C. Lemaire | 2021-08-31 |
| 10998187 | Selective deposition with atomic layer etch reset | Kapu Sirish Reddy, Meliha Gozde Rainville, Nagraj Shankar, David Charles Smith, Karthik Sivaramakrishnan +1 more | 2021-05-04 |
| 10903071 | Selective deposition of silicon oxide | David Charles Smith | 2021-01-26 |