Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183383 | Tin oxide thin film spacers in semiconductor device manufacturing | Richard Wise, Arpan Mahorowala, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2021-11-23 |
| 11127567 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Shankar Swaminathan, Jun Qian, Chloe Baldasseroni +8 more | 2021-09-21 |
| 11107683 | Selective growth of metal-containing hardmask thin films | Jon Henri, Dennis M. Hausmann, Paul C. Lemaire | 2021-08-31 |
| 11031245 | Tin oxide thin film spacers in semiconductor device manufacturing | Richard Wise, Arpan Mahorowala, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2021-06-08 |
| 10998187 | Selective deposition with atomic layer etch reset | Kapu Sirish Reddy, Meliha Gozde Rainville, Nagraj Shankar, Dennis M. Hausmann, Karthik Sivaramakrishnan +1 more | 2021-05-04 |
| 10903071 | Selective deposition of silicon oxide | Dennis M. Hausmann | 2021-01-26 |