Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094542 | Selective deposition of etch-stop layer for enhanced patterning | Kapu Sirish Reddy, Jon Henri, Pengyi Zhang, Elham Mohimi, Bhavin Jariwala +1 more | 2021-08-17 |
| 10998187 | Selective deposition with atomic layer etch reset | Kapu Sirish Reddy, Meliha Gozde Rainville, Dennis M. Hausmann, David Charles Smith, Karthik Sivaramakrishnan +1 more | 2021-05-04 |
| 10900124 | Substrate processing chamber with showerhead having cooled faceplate | Damodar Rajaram Shanbhag | 2021-01-26 |