Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107683 | Selective growth of metal-containing hardmask thin films | David Charles Smith, Dennis M. Hausmann, Paul C. Lemaire | 2021-08-31 |
| 11094542 | Selective deposition of etch-stop layer for enhanced patterning | Nagraj Shankar, Kapu Sirish Reddy, Pengyi Zhang, Elham Mohimi, Bhavin Jariwala +1 more | 2021-08-17 |
| 11075127 | Suppressing interfacial reactions by varying the wafer temperature throughout deposition | Seshasayee Varadarajan, Aaron R. Fellis, Andrew John McKerrow, James S. Sims, Ramesh Chandrasekharan | 2021-07-27 |