Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183400 | Progressive heating of components of substrate processing systems using TCR element-based heaters | Easwar Srinivasan | 2021-11-23 |
| 11111581 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Chunguang Xia, Douglas Keil, Edward Augustyniak, Karl Leeser | 2021-09-07 |
| 11072860 | Fill on demand ampoule refill | Tuan Nguyen, Eashwar Ranganathan, Shankar Swaminathan, Adrien LaVoie, Chloe Baldasseroni +2 more | 2021-07-27 |
| 11075127 | Suppressing interfacial reactions by varying the wafer temperature throughout deposition | Seshasayee Varadarajan, Aaron R. Fellis, Andrew John McKerrow, James S. Sims, Jon Henri | 2021-07-27 |
| 11028482 | Use of voltage and current measurements to control dual zone ceramic pedestals | Aaron Durbin, Dirk Rudolph, Thomas G. Jewell | 2021-06-08 |