Issued Patents 2021
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209729 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Dennis M. Hausmann, Thomas Knisley +3 more | 2021-12-28 |
| 11180850 | Dynamic precursor dosing for atomic layer deposition | Purushottam Kumar, Jun Qian, Hu Kang, Ishtak Karim, Fung Suong Ou | 2021-11-23 |
| 11133180 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Shankar Swaminathan, Jun Qian, Wanki Kim, Dennis M. Hausmann +1 more | 2021-09-28 |
| 11127567 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Shankar Swaminathan, Jun Qian, Chloe Baldasseroni, Frank L. Pasquale +8 more | 2021-09-21 |
| 11101129 | Ultrathin atomic layer deposition film accuracy thickness control | Jun Qian, Hu Kang, Seiji Matsuyama, Purushottam Kumar | 2021-08-24 |
| 11078570 | Azimuthal critical dimension non-uniformity for double patterning process | Pulkit Agarwal, Frank L. Pasquale, Ravi Kumar | 2021-08-03 |
| 11072860 | Fill on demand ampoule refill | Tuan Nguyen, Eashwar Ranganathan, Shankar Swaminathan, Chloe Baldasseroni, Ramesh Chandrasekharan +2 more | 2021-07-27 |
| 11021792 | Symmetric precursor delivery | Eli Jeon, Purushottam Kumar, Jeffrey Kersten, Gautam Dhar | 2021-06-01 |
| 11011379 | Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors | Reza Arghavani, Samantha Tan, Bhadri N. Varadarajan, Ananda Banerji, Jun Qian +1 more | 2021-05-18 |
| 10978302 | Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film | Ishtak Karim, Pulkit Agarwal, Joseph R. Abel, Purushottam Kumar | 2021-04-13 |