Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11078570 | Azimuthal critical dimension non-uniformity for double patterning process | Adrien LaVoie, Frank L. Pasquale, Ravi Kumar | 2021-08-03 |
| 10978302 | Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film | Ishtak Karim, Joseph R. Abel, Purushottam Kumar, Adrien LaVoie | 2021-04-13 |