Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978302 | Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film | Ishtak Karim, Pulkit Agarwal, Purushottam Kumar, Adrien LaVoie | 2021-04-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978302 | Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film | Ishtak Karim, Pulkit Agarwal, Purushottam Kumar, Adrien LaVoie | 2021-04-13 |