Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180850 | Dynamic precursor dosing for atomic layer deposition | Adrien LaVoie, Jun Qian, Hu Kang, Ishtak Karim, Fung Suong Ou | 2021-11-23 |
| 11101129 | Ultrathin atomic layer deposition film accuracy thickness control | Jun Qian, Hu Kang, Adrien LaVoie, Seiji Matsuyama | 2021-08-24 |
| 11021792 | Symmetric precursor delivery | Eli Jeon, Adrien LaVoie, Jeffrey Kersten, Gautam Dhar | 2021-06-01 |
| 10978302 | Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film | Ishtak Karim, Pulkit Agarwal, Joseph R. Abel, Adrien LaVoie | 2021-04-13 |