Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180850 | Dynamic precursor dosing for atomic layer deposition | Purushottam Kumar, Adrien LaVoie, Jun Qian, Hu Kang, Fung Suong Ou | 2021-11-23 |
| 10978302 | Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film | Pulkit Agarwal, Joseph R. Abel, Purushottam Kumar, Adrien LaVoie | 2021-04-13 |