Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11078570 | Azimuthal critical dimension non-uniformity for double patterning process | Pulkit Agarwal, Adrien LaVoie, Frank L. Pasquale | 2021-08-03 | $392,480,000 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11078570 | Azimuthal critical dimension non-uniformity for double patterning process | Pulkit Agarwal, Adrien LaVoie, Frank L. Pasquale | 2021-08-03 | $392,480,000 |