Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11078570 | Azimuthal critical dimension non-uniformity for double patterning process | Pulkit Agarwal, Adrien LaVoie, Frank L. Pasquale | 2021-08-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11078570 | Azimuthal critical dimension non-uniformity for double patterning process | Pulkit Agarwal, Adrien LaVoie, Frank L. Pasquale | 2021-08-03 |