Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209729 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie, Thomas Knisley +3 more | 2021-12-28 |
| 11162897 | Optical metrology device using numerical aperture reduction | Troy Daniel Ribaudo, Michael J. Hammond | 2021-11-02 |
| 10901241 | Optical metrology system using infrared wavelengths | Troy Daniel Ribaudo | 2021-01-26 |