| 11183368 |
RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks |
David French, Vincent E. Burkhart, Liang Meng |
2021-11-23 |
| 11131480 |
Apparatus for thermal control of tubing assembly and associated methods |
— |
2021-09-28 |
| 11127567 |
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity |
Hu Kang, Adrien LaVoie, Shankar Swaminathan, Jun Qian, Chloe Baldasseroni +8 more |
2021-09-21 |
| 11111581 |
Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region |
Chunguang Xia, Ramesh Chandrasekharan, Douglas Keil, Edward Augustyniak |
2021-09-07 |
| 11056380 |
Wafer positioning pedestal for semiconductor processing |
Paul Konkola, Easwar Srinivasan |
2021-07-06 |
| 11038483 |
Multiple-output radiofrequency matching module and associated methods |
Sunil Kapoor, Bradford J. Lyndaker |
2021-06-15 |
| 11024531 |
Optimized low energy / high productivity deposition system |
Michael Nordin, Richard M. Blank, Robert Sculac |
2021-06-01 |
| 10991550 |
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system |
Eller Y. Juco, David French, Sunil Kapoor, Aaron Bingham, David Alan Metz +3 more |
2021-04-27 |
| 10984987 |
Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression |
Michael John Selep, Patrick Breiling, Timothy Scott Thomas, David William Kamp, Sean M. Donnelly |
2021-04-20 |
| 10923385 |
Carrier plate for use in plasma processing systems |
— |
2021-02-16 |
