Issued Patents 2021
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183368 | RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks | David French, Vincent E. Burkhart, Liang Meng | 2021-11-23 |
| 11131480 | Apparatus for thermal control of tubing assembly and associated methods | — | 2021-09-28 |
| 11127567 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Shankar Swaminathan, Jun Qian, Chloe Baldasseroni +8 more | 2021-09-21 |
| 11111581 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Chunguang Xia, Ramesh Chandrasekharan, Douglas Keil, Edward Augustyniak | 2021-09-07 |
| 11056380 | Wafer positioning pedestal for semiconductor processing | Paul Konkola, Easwar Srinivasan | 2021-07-06 |
| 11038483 | Multiple-output radiofrequency matching module and associated methods | Sunil Kapoor, Bradford J. Lyndaker | 2021-06-15 |
| 11024531 | Optimized low energy / high productivity deposition system | Michael Nordin, Richard M. Blank, Robert Sculac | 2021-06-01 |
| 10991550 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Eller Y. Juco, David French, Sunil Kapoor, Aaron Bingham, David Alan Metz +3 more | 2021-04-27 |
| 10984987 | Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression | Michael John Selep, Patrick Breiling, Timothy Scott Thomas, David William Kamp, Sean M. Donnelly | 2021-04-20 |
| 10923385 | Carrier plate for use in plasma processing systems | — | 2021-02-16 |