Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183368 | RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks | David French, Karl Leeser, Liang Meng | 2021-11-23 |
| 11086233 | Protective coating for electrostatic chucks | Stephen Topping | 2021-08-10 |