Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183368 | RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks | Vincent E. Burkhart, Karl Leeser, Liang Meng | 2021-11-23 |
| 11183406 | Control of wafer bow in multiple stations | Edward Augustyniak, Sunil Kapoor, Yukinori Sakiyama, George Thomas | 2021-11-23 |
| 10991550 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Eller Y. Juco, Karl Leeser, Sunil Kapoor, Aaron Bingham, David Alan Metz +3 more | 2021-04-27 |