Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183406 | Control of wafer bow in multiple stations | Edward Augustyniak, David French, Sunil Kapoor, Yukinori Sakiyama | 2021-11-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183406 | Control of wafer bow in multiple stations | Edward Augustyniak, David French, Sunil Kapoor, Yukinori Sakiyama | 2021-11-23 |