Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183406 | Control of wafer bow in multiple stations | Edward Augustyniak, David French, Yukinori Sakiyama, George Thomas | 2021-11-23 |
| 11038483 | Multiple-output radiofrequency matching module and associated methods | Karl Leeser, Bradford J. Lyndaker | 2021-06-15 |
| 10991550 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Eller Y. Juco, Karl Leeser, David French, Aaron Bingham, David Alan Metz +3 more | 2021-04-27 |