Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D935424 | Semiconductor wafer processing tool | — | 2021-11-09 |
| 10991550 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Karl Leeser, David French, Sunil Kapoor, Aaron Bingham, David Alan Metz +3 more | 2021-04-27 |