Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189454 | Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system | Daniel Carter, Daniel J. Hoffman | 2021-11-30 |
| 11011349 | System, method, and apparatus for controlling ion energy distribution in plasma processing systems | Daniel J. Hoffman, Daniel Carter | 2021-05-18 |