Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101164 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Bo Gong, Will Schlosser +3 more | 2021-08-24 |
| 10984987 | Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression | Michael John Selep, Karl Leeser, Timothy Scott Thomas, David William Kamp, Sean M. Donnelly | 2021-04-20 |