Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression

Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression

US Patent 10984987 · Granted Apr 20, 2021

Estimated economic value: $284,078,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Split showerhead cooling plate2025
Shower head2025
Thermally controlled chandelier showerhead2025
Thermally controlled chandelier showerhead2025
Process module chamber providing symmetric RF return path2025
Multiple-output radiofrequency matching module and associated methods2025
Impedance transformation in radio-frequency-assisted plasma generation2025
Plasma-enhanced deposition of film stacks2025
Common terminal heater for ceramic pedestals used in semiconductor for fabricati2025
In situ protective coating of chamber components for semiconductor processing2025
Lamellar ceramic structure2025
Integrated showerhead with thermal control for delivering radical and precursor 2025