Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183383 | Tin oxide thin film spacers in semiconductor device manufacturing | David Charles Smith, Richard Wise, Arpan Mahorowala, Bart J. van Schravendijk | 2021-11-23 |
| 11088019 | Method to create air gaps | Seshasayee Varadarajan, Bart J. van Schravendijk | 2021-08-10 |
| 11031245 | Tin oxide thin film spacers in semiconductor device manufacturing | David Charles Smith, Richard Wise, Arpan Mahorowala, Bart J. van Schravendijk | 2021-06-08 |
| 10957514 | Apparatus and method for deposition and etch in gap fill | Akhil Singhal, Martin E. Freeborn, Bart J. van Schravendijk | 2021-03-23 |