Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957514 | Apparatus and method for deposition and etch in gap fill | Akhil Singhal, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2021-03-23 |
MF
Martin E. Freeborn
Overall (2021): #351,906 of 548,734Top 65%
1
Patents 2021