Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031244 | Modification of SNO2 surface for EUV lithography | Nader Shamma, Dustin Zachary Austin | 2021-06-08 |
| 10957514 | Apparatus and method for deposition and etch in gap fill | Patrick A. Van Cleemput, Martin E. Freeborn, Bart J. van Schravendijk | 2021-03-23 |