Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114294 | Structure including SiOC layer and method of forming same | Shankar Swaminathan, YoungChol Byun, Eric James Shero | 2021-09-07 |
| 10892156 | Methods for forming a silicon nitride film on a substrate and related semiconductor device structures | Jacob Woodruff, Eric James Shero | 2021-01-12 |