Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139383 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen +2 more | 2021-10-05 |
| 10903113 | Selective deposition of aluminum and nitrogen containing material | Han Wang, Qi Xie, Delphine Longrie, Jan Willem Maes, David Kurt de Roest +4 more | 2021-01-26 |