Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139163 | Selective deposition of SiOC thin films | Jan Willem Maes, Oreste Madia | 2021-10-05 |
| 11094546 | Method for selectively depositing a metallic film on a substrate | Delphine Longrie | 2021-08-17 |
| 11022879 | Method of forming an enhanced unexposed photoresist layer | Jan Willem Maes, Krzysztof Kamil Kachel | 2021-06-01 |
| 10928731 | Method of sequential infiltration synthesis treatment of infiltrateable material and structures and devices formed using same | Krzysztof Kamil Kachel | 2021-02-23 |
| 10903113 | Selective deposition of aluminum and nitrogen containing material | Han Wang, Qi Xie, Delphine Longrie, Jan Willem Maes, Julian Hsieh +4 more | 2021-01-26 |