Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195712 | Process for deposition of titanium oxynitride for use in integrated circuit fabrication | Viljami Pore, Seiji Okura | 2021-12-07 |
| 11094535 | Selective passivation and selective deposition | Eva Tois, Suvi Haukka, Raija H. Matero, Elina Färm, Delphine Longrie +5 more | 2021-08-17 |
| 11081342 | Selective deposition using hydrophobic precursors | Elina Färm, Raija H. Matero, Antti Niskanen, Suvi Haukka, Eva Tois | 2021-08-03 |
| 10923361 | Deposition of organic films | Eva Tois, Viljami Pore, Suvi Haukka, Varun Sharma, Jan Willem Maes +2 more | 2021-02-16 |