Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133181 | Formation of SiN thin films | Toshiya Suzuki, Viljami Pore, Ryoko Yamada, Dai Ishikawa, Kunitoshi Namba | 2021-09-28 |
| 11069522 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Viljami Pore, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka | 2021-07-20 |