Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127589 | Method of topology-selective film formation of silicon oxide | Masaru Zaitsu | 2021-09-21 |
| 11069522 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Shang Chen, Viljami Pore, Hideaki Fukuda, Suvi Haukka | 2021-07-20 |
| 11056345 | Method for manufacturing semiconductor device | — | 2021-07-06 |