Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187991 | Lithographic apparatus and a method of operating the apparatus | Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Erik Henricus Egidius Catharina Eummelen, Michel Riepen +3 more | 2021-11-30 |
| 11048180 | Component for use in a patterning device environment | Andrey Nikipelov, Vadim Yevgenyevich Banine, Edwin Te Sligte, Marcus Adrianus Van De Kerkhof, Ferdinandus Martinus Jozef Henricus Van De Wetering | 2021-06-29 |