Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199771 | Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus | Stef Marten Johan Janssens, Koen Cuypers, Rogier Hendrikus Magdalena Cortie, Sudhir Srivastava, Theodorus Johannes Antonius Renckens +4 more | 2021-12-14 |
| 11187991 | Lithographic apparatus and a method of operating the apparatus | Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Michel Riepen +3 more | 2021-11-30 |
| 11143969 | Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus | Giovanni Luca Gattobigio, Nirupam Banerjee, Johan Franciscus Maria Beckers, Ronald Frank KOX, Theodorus Wilhelmus Polet +4 more | 2021-10-12 |
| 11048178 | Lithographic apparatus with improved patterning performance | Federico La Torre, Laurentius Johannes Adrianus Van Bokhoven, José Nilton Fonseca, Jr., Gerben Pieterse, Frank Johannes Jacobus Van Boxtel | 2021-06-29 |
| 10969695 | Fluid handling structure and lithographic apparatus | Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu, Cornelius Maria Rops +4 more | 2021-04-06 |