Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143969 | Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus | Giovanni Luca Gattobigio, Nirupam Banerjee, Erik Henricus Egidius Catharina Eummelen, Ronald Frank KOX, Theodorus Wilhelmus Polet +4 more | 2021-10-12 |
| 10976196 | Sensor mark and a method of manufacturing a sensor mark | Joost André KLUGKIST, Vadim Yevgenyevich Banine, Madhusudhanan Jambunathan, Maxim Aleksandrovich Nasalevich, Andrey Nikipelov +4 more | 2021-04-13 |
| 10948825 | Method for removing photosensitive material on a substrate | Christianus Wilhelmus Johannes Berendsen, Güneş Nakibo{hacek over (g)}lu, Daan Daniel Johannes Antonius Van Sommeren, Gijsbert Rispens, Theodorus Johannes Antonius Renckens | 2021-03-16 |