Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143975 | Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling off | Andrey Nikipelov, Vadim Yevgenyevich Banine, Joost André KLUGKIST, Roland Johannes Wilhelmus Stas, Sando Wricke | 2021-10-12 |
| 10983431 | Pellicle and pellicle assembly | David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more | 2021-04-20 |
| 10976196 | Sensor mark and a method of manufacturing a sensor mark | Joost André KLUGKIST, Vadim Yevgenyevich Banine, Johan Franciscus Maria Beckers, Madhusudhanan Jambunathan, Andrey Nikipelov +4 more | 2021-04-13 |
| 10908496 | Membrane for EUV lithography | Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns, Paul Janssen +17 more | 2021-02-02 |